Solar Solutions

 

Wide area implant system

  • Grid Chamber based implant system
  • Complete system control including RF, Process Grid and Target
  • Vacuum, Gas delivery and Thermal Management
  • High Voltage control and safety systems

 

 

Linear Accelerator

  • Target changer control systems
  • Beam pattern manipulation and focus
  • Dose Measurement
  • Target thermal management
  • Vacuum and Fluidics system control
  • Vacuum stage motion control

 

 

Smart Press Machine

  • Precision control of boning forces in planar control using load cells and 3 actuators
  • High speed trim and adjustments to level forces in real time
  • Accept and adjusts for compliant bonding materials
  • Operating at 20000lbsf planar