Flexline LLC has created a Semiconductor gas pallet test fixture utilizing National Instruments Compact FieldPoint controller and DeviceNet scanner card.  The test fixture tests the transducers, regulators, pneumatic valves, MFC’s and interlocks at the component level.  Flow path testing and leak testing are also performed on the 300mm EPI ATM and RP style gas panels for Applied Materials Inc. 

 The 300mm EPI gas pallet is complex and highly configurable.  There are up to 28 individual sticks with as many as 36 design variations. 

 Flexline LLC software allows for on the fly test configurations for flexibility and reduced fixture maintenance costs.  MFC sizing, Gas sticks, transducers, and regulators can be configured to a test as required by a gas panel options.  The software also allows for custom recipe editing for flow path and transducer testing.   

 The NI Compact field point controller with 8 position backplane is the processing power behind the test fixture.  The Compact FieldPoint module proved very easy to program, and very easy to work with through the development and deployment phase of the project.   The response period, accuracy and configurability of the Field point modules was a key determining factor in selection of the product for use in the fixture. 

1) NI Compact FieldPoint Controller AI/O. DI/O Modules

2) NI DeviceNet Scanner Card