Robot Repeatability Test Fixture

Major features:

1. Motion control of a four-axis robot (two linear axis and two rotational axis, one AC-Servo, three stepper)
2. Measurement of  the repeatability of each axis at two locations simulating a CES station and a buffer station. 
3. Precision for displacement measurement for the linear axes: 0.0001 Inch 
4. Precision for angular variation for the rotational axes: 0.01 degree.
5. Separation of position errors for each axis at both measurement station.
6. Manual operation/monitoring of each axis and all AI/AO and DI/DO channels on the robot and the test fixture.
7. Trouble shoot facilities for fixing robot problems.
8. Quick set-up features for different types of robot configuration.
9. Safety mat feature pauses robot 

Exhaust Flow Controller Test Fixture

Major features:

1. Generate constant flow up to 2500 SLPM and cycle a two channel air flow controller.
2. Measure the repeatability and accuracy of flow rate control and response time for each each channel. 
3. Flow rate measurement resolution: 1 SLPM.
4. Precision of response time measurement: 1 mili second.
5. Generate very low vacuum reference for on-board sensor calibration.

Large Scale System Controller Tester 

Major features:

1. Vision and switching technology is used to test massive IO and motion control axes.
2. Maximum number of opto isolated digital input channels: 160
3. Maximum number of opto isolated digital out-channels: 128
4. Maximum number of analog input channels: 16
5. Two RS-232 ports and two RS-485 communication ports.
6. Test up to 16 motion control axes for servo motors.
7. Test up to 16 motion control axes for stepper motors.
8. AI reference voltage precision: 0.1 mVolt.
9. Motion control position measurement precision: 1 degree
10. Extensive trouble shooting utilities
11. CCD camera calibration utility
12. Database (MS SQL server) interface and data logging

Chemical Delivery Test Fixture

Major features:

1. Safety interlock test (PLC watchdog, leak sensor, overflow sensor)
2. Whole and regional plumbing leak test
3. Pressure relieve valve test
4. Digital communication line test
5. Generating very low vacuum reference for setting up the exhaust flow alarm sensor
6. Pressure rate of rise measurement resolution: 0.0003 psi/min
7. trouble shooting utilities

AC/DC Power Distribution Test Fixture

Major features:

1. Switching technology is used to measure massive number of power distribution lines for voltage and resistance.
2. Maximum number of electrical wiring pairs: 128
3. Auto-detection of short circuit before applying power
4. AC voltage range: 0 to 260 VAC
5. DC voltage range: 0 to 60 VDC
6. Resistance: up to 100 MOHM
7. Easy and multiple test configurations in Microsoft Excel Spread Sheet

Semiconductor Chamber Test Fixture

Major features:

1. Safety interlock test
2. Wafer lift home sensor set-up
3. Wafer lift cycling
4. Wafer lift home and cycle position accuracy monitoring.

PCB Functional Test Fixture

Major features:

1. CAN communication 
2. Six serial communication ports 
3. Six analog input channels 
4. Embedded test program object developed
5. Fully automated and integrated micro controller test fixture

SCARA Robot Repeatability Test Fixture

Major Features

1. Motion control of a six-axis robot (Three rotational axis, Z axis and two Servo,)
2. Precision for displacement measurement: 0.0001 Inch 
3. Burn-in and cycling features
4. Trouble shoot facilities for fixing robot problems.

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